Diagnostics for plasma processing (etching plasmas) (invited)
نویسندگان
چکیده
منابع مشابه
Diagnostics of etching plasmas *
Radio-frequency excited, low-pressure plasmas in halogen-containing gases are widely used to etch submicronic features in a range of materials during integrated circuit manufacture. Costly process-drift problems are often caused by the ubiquitous deposition of polymer layers on the reactor walls. Simple and robust sensors of the reactor performance are needed to monitor and manage these effects...
متن کاملOptical plasma emission spectroscopy of etching plasmas used in Si-based semiconductor processing
Previously published applications of optical emission spectroscopy as a quantitative plasma diagnostic technique are reviewed. By adding traces of rare gases to the plasma, electron temperatures (Te) and relative electron and ion densities can be determined from electron impact-induced optical emission. Excitation from both the ground state and metastable states of the rare gases must be consid...
متن کاملPlasma diagnostics in air plasmas containing water droplets
Atmospheric pressure plasmas are emerging as an effective means to produce reactive nitrogen species (RNS) in water with potential applications in irrigation with plasma-treated water for enhanced agriculture. Indeed, roles of RNS, mainly nitric oxide (NO), nitrite (NO2 ) and nitrate (NO3 ) in plant biology have been well studied [1]. The acidity and RNS concentration in treated water have been...
متن کاملNumerical Simulation of Bosch Processing for Deep Silicon Plasma Etching
We present a simulation of the Bosch process using the feature-scale modeling software FPS3D. FPS3D is a generic simulator that can be applied to any set of materials, plasmas, reactive gases, and reactions for both 2D and 3D simulations of etching and deposition. FPS3D can simulate multi-time-step processes for which the fluxes, species, reactions, ion energies, angular distributions, and othe...
متن کاملSpectroscopic diagnostics of plasma during laser processing
The role of the plasma in laser–metal interaction is of considerable interest due to its influence in the energy transfer mechanism in industrial laser materials processing. A 10 kW CO2 laser was used to study its interaction with aluminium under an argon environment. The objective was to determine the absorption and refraction of the laser beam through the plasma during the processing of alumi...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 1997
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1147752